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Moore Technologies Product Lines
Moore Technologies products are covered by the following patents: 5444217, 5207835, 5240024, 5601107, 5580388, 5053247, 5417236, 5683518, 5801961, 5802099, 5710407, 5820686, 6151447, 6310327, 5872632, 6110289, 6213478, 6163015, 6169244, 6347749, 6328221, 0461194, 3132827, 0746009, 64286609, 6443618, 6475284, 6491435, 6592675, 90904991.8 as well as pending patents and copyrights
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eZEN CVD system
Our Design philosphy - "Reduce CVD film costs, produce the highest quality product and set a standard that all others must follow". The eZEN CVD system is just such a product. Based on the "Mini-Batch™" platform, it's capable of running five 5" and 6" and three 8" wafers.
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MT7700 Systems
The MT7700 family systems bring major economic advantages to the epi market. High yield is a result of outstanding film quality and run-to-run repeatability. With the new heat array of 23 lamps for each module and the improved heat power distribution, the MT7700K outperforms the older model 7700.
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SIMGUI Wafer Fab
Moore Technologies is ready to meet your needs and solve your epitaxial problems! Wafer diameters available: 50, 75, 100, 125, 150 and 200mm using MT 78XXK and MT7700K reactors. RP and atmospheric processing provided on barrel and single wafer systems with uniformities to your requirements.
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Expandoman - Expansion Kit
Leave it to the Expandoman to develop a way to expand your epitaxial capacity and lower your epitaxial costs. With the Expansion Kit®, your 78XX and 7700 system can now be retrofitted for 3 high 150mm wafers; that is a batch size of 15-150mm wafers.
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7700 Expansion Kit
Improve Thickness and Resistivity Uniformities on Auto or Manual Systems. Reduce or Eliminate the thickness spiral as well as the problem on the top of top wafer. Produces 24 - 5" wafers per run
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Turbo Console
The total system approach to increasing the productivity of your Applied Materials 78XX or 7700 epitaxial reactor. The Turboconsole controller is Moore Technologies newest process innovation.
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Metrology Systems
Quality & Simplicity - Our built in spectrophotometer and background standards, combined with enhanced FTIR techniques ensure all your film characterizations will be correct and repeatable.
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8 Zone Temp Systems
"8 Zone Temperature Control" provides a new dimension in temperature profiling (ie. Thickness, Slip and Resistivity performance). Totally new power control system for your 19 Lamp Expansion Kit®.
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The Global Parts Source
Your one stop shopping for all your parts distrubution needs including: AMT78XX, AMT7700, MT7700 and MT7700K epitaxial barrel reactors. All parts are licensed and inspected to manufacturer's original drawings. Improved options are also available.
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Piezocon Controller
The LOREX mass transfer control system eliminates the effects of variables on your vapor delivery system. This revolutionary technology in upgrade kits is designed for the 7700 and 78XX series reactors.
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If you need technical or information support, please, write to support@mooretech.com.
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